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NEWS
Type and cleaning method of quartz glass tube
release time:
2021-11-12
It takes 1 to 2 days to clean used pipes. Do not press the "sink start" button when scouring the inner wall of the quartz tube. If it has been pressed, press the "sink end" button again. After 2 minutes of scouring, it will continue to scour from the pipe orifice. Pull down the protective door, set the washing time of the water tank to 30min, and press the "Water tank start" button. When scouring, be careful and do not leave areas that have not been washed.
Cleaning method of quartz tube:
It takes 1 to 2 days to clean used pipes. Do not press the "sink start" button when scouring the inner wall of the quartz tube. If it has been pressed, press the "sink end" button again. After 2 minutes of scouring, it will continue to scour from the pipe orifice. Pull down the protective door, set the washing time of the water tank to 30min, and press the "Water tank start" button. When scouring, be careful and do not leave areas that have not been washed.
1. The cleaning staff must wear protective glasses and acid-proof gloves, and then put the spare quartz tube into the groove near the inside of the quartz tube cleaning machine, with the tube mouth facing the velvet room, and the tube tail pointing to the direction of the diffusion furnace.
2. Fill the water tank with pure water, and the water level shall be subject to the middle vent pipe at the end of the quartz tube. Focus on scouring the inner wall.
3. Repeat step 6 and clean again.
4. After the sink is finished, drain the water in the sink.
5. The whole process of cleaning the quartz tube should be carried out in strict accordance with the relevant process safety standards of the diffusion process.
6. After cleaning, put the quartz tube at the designated position in the purification room, and put special foam under it.
7. If there is used hydrofluoric acid solution in the cleaning tank, add 10 bottles of hydrofluoric acid (prepared by the production staff) if the solution is not dirty; If the original hydrofluoric acid solution is very dirty, the tank should be completely emptied and cleaned, and then the production staff should be informed to prepare the solution; If there is no hydrofluoric acid solution left in the tank, please ask the production staff to prepare the solution after cleaning the tank.
8. Seal the nozzle and tail pipe with special aluminum foil.
9. Setting of acid bath cleaning time:
The new quartz tube only needs to be cleaned for about 30min. Then pull the water gun to the mouth of the quartz tube and wash the inner wall of the tube from the mouth to the end of the tube. Pull down the protective door, set the acid tank cleaning time to 30min, and press the "acid tank start" button in the control panel. When the acid tank is not started, the quartz tube should be rotated 180 ° every 2 hours. If it is a used quartz tube, the time when the white phosphorus pentoxide adhered on the inner wall of the tube is completely removed shall prevail. After 2 minutes, turn the quartz tube 180 °, and then wash it for 2 minutes in the same way. After about 5min, flush the four small vent pipes at the end of the pipe with a water gun, focusing on the inner wall of the pipe. The cleaning time in this step shall not be less than 15min, and the sign of cleaning shall be that there is no granular phosphate residue on the inner and outer walls of the pipe.
10. The cleaning staff should wear protective glasses and gloves, take the quartz tube out of the acid bath and put it into the sink gently. Then, flush the inner/outer wall of the quartz tube with a water gun according to the method in Step 5 above. After emptying the water in the water tank, flush the inner and outer walls of the quartz tube with a water gun for about 5 minutes.
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